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Facilities & Equipment

iNano Nanoindenter

Nanomechanics Inc. iNano Nanoindenter

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ORION Magnetron Sputtering System

AJA ORION Magnetron Sputtering System:  This magnetron sputtering system consists of 4 confocally oriented guns capable of depositing films of varying thicknesses and compositions under RF or DC bias. System includes ability to apply RF bias to substrates and to heat substrates for annealing or elevated temperature depositions.

ORION Magnetron Sputtering System

Arc Melting System

Edmund Buhler GmbH MAM-1 Mini Arc Melting System

Arc Melting System

Kelvin Probe

KP Technologies Kelvin probe system

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FLX 2320-S wafer curvature system

FLX 2320-S wafer curvature system (Toho Technology)

Thin film damping measurement system

Thin film damping measurement system (built at Stanford University)

Microspecimen Testing System

Microspecimen Testing System (custom built based on design by Prof. Dr. Eberl of the Fraunhofer Institute for Mechanics of Materials IWM)